Reactor architecture, process windows, monitoring, equipment supply chains, manufacturing maturity, and capacity expansion.
3 articles · newest first
Large area and high reactor power are visible achievements. Manufacturing maturity is demonstrated by repeatability, tool matching, process control, qualification, and reliable delivery.
A W–Si–Mo comparison offers useful evidence on stress in MPCVD polycrystalline diamond, but it does not yet establish a scalable release process or production economics.
Plasma emission, methane-related by-products and substrate emissivity can all push single- and two-color pyrometer readings away from the true substrate temperature in MPCVD.
